The master's thesis consists of an introduction, 5 chapters, conclusions to all the work done, and a list of references. The thesis contains 106 pages of main text, 37 illustrations, 40 tables and 30 references. The total volume of the master's thesis is 113 pages.
Purpose and objectives of the work. The purpose of the master's thesis is to study the capacitive MEMS sensitive element of the stabilization system.
The subject of research: the capacitive sensing element of the stabilization system.
Research methods: the method underlying the operation of the capacitive sensing element is based on the change in capacitance between the covers, which occurs due to the movement of a moving inertial mass due to the acceleration of gravity.
Novelty of the results: A new two-channel capacitive MEMS gravimeter AGS has been proposed and investigated. It is substantiated that the use of two channels of the capacitive MEMS gravimeter provides an increase in the accuracy and speed of the PST measurements.
Practical significance of the results: The features of the design of the CE, the two-channel design of the ECE are considered. Methods for eliminating zero-point offset errors are considered. An overview of the method of increasing the number of measurements is given. An overview of the program compensation method is given. An overview of the method of design complication is given. The application of the neural network approach to the development of algorithms for the functioning of the AGS and the correction of the stabilization system and the inertial navigation system is considered. The design of a three-axis capacitive gravimeter with a two-channel design of each of the axes is considered.
Research advisor: O. Bezvesilna
