The master's thesis consists of an introduction, 5 chapters, conclusions to all the work done, and a list of references. The thesis contains 106 pages of main text, 37 illustrations, 40 tables and 30 references. The total volume of the master's thesis is 113 pages.
Purpose and objectives of the work. The purpose of the master's thesis is to study the capacitive MEMS sensitive element of the stabilization system.
The subject of research: the capacitive sensing element of the stabilization system.
Research methods: the method underlying the operation of the capacitive sensing element is based on the change in capacitance between the covers, which occurs due to the movement of a moving inertial mass due to the acceleration of gravity.
Novelty of the results: A new two-channel capacitive MEMS gravimeter AGS has been proposed and investigated. It is substantiated that the use of two channels of the capacitive MEMS gravimeter provides an increase in the accuracy and speed of the PST measurements.
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